Determination of acid diffusion in chemical amplification positive deep ultraviolet resists
- 1 March 1991
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 9 (2) , 278-289
- https://doi.org/10.1116/1.585607
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: