Optical properties of bonded silicon silicide on insulator (S2OI): a new substrate for electronic and optical devices

Publisher Website

1 February 1998

journal article
Published by Elsevier in Thin Solid Films

Vol. 313-314, 276-280
https://doi.org/10.1016/s0040-6090(97)00832-8

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

Buried WSi/sub x/ SOI structures
Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
Optical properties of ${WSi}_{2}$
Physical Review B, 1991