Summary Abstract: Properties of several types of films deposited by laser CVD

• 1 March 1982
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 20  (3) , 469-470
• https://doi.org/10.1116/1.571337

Abstract

Keywords

• SUMMARY ABSTRACT
• LASER CVD
• PROPERTIES
• FILMS DEPOSITED