Metallic microdevices fabricated by deep-etch UV lithography
- 28 February 1993
- journal article
- Published by Elsevier in Materials Science and Engineering: A
- Vol. 160 (2) , 5-8
- https://doi.org/10.1016/0921-5093(93)90461-m
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Three-dimensional microfabrication using synchrotron radiationNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1991