Humidity Sensors Using Chemically Modified Polymer Thin Films

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Abstract
Most of the humidity sensors practically used are based on the change in electrical properties of polymers or ceramics with humidity. They are either resistive-type or capacitive-type sensors. Various chemical modifications of polymeric materials have been utilized to improve the properties of sensors such as sensitivity, hysteresis, long-term stability, durability in unfavorable atmospheres such as dewdrops or vapors of volatile organic compounds (VOC), etc. This paper overviews the novel methods of chemical modification which have been proposed by the authors.