Humidity-dependent mechanical properties of polyimide films and their use for IC-compatible humidity sensors
- 1 May 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 53 (1-3) , 330-334
- https://doi.org/10.1016/0924-4247(96)01132-6
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A piezoresistive humidity sensorSensors and Actuators A: Physical, 1994
- Dynamic mechanical behavior of a polyimideJournal of Applied Polymer Science, 1968