Ion-beam sputtered indium tin oxide for InP solar cells

• 1 May 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (3) , 428-431
• https://doi.org/10.1116/1.573896

Abstract

Keywords

• THIN FILM
• REFRACTIVE INDEX
• INDIUM TIN OXIDE
• ION BEAM