Miniature Planar Solid Immersion Mirror with Focused Spot Less Than a Quarter Wavelength

1 January 2005

journal article
Published by Optica Publishing Group in Optics Express

Vol. 13 (18) , 7189-7197
https://doi.org/10.1364/opex.13.007189

Abstract

We describe a microoptical planar waveguide solid immersion mirror with high optical throughput, and show that it can focus light to spot sizes of ~90 nm at a wavelength of 413 nm. Scanning near field optical microscope images of the light within the device are in good agreement with a simple theoretical model. This device is accurately mass-produced with lithographic and thin film deposition techniques known from modern integrated circuit processing.

Keywords

ELECTRON BEAM LITHOGRAPHY
NEAR FIELD SCANNING OPTICAL MICROSCOPY
OPTICAL SYSTEMS
STRAY LIGHT
TAPERED FIBERS
TOTAL INTERNAL REFLECTION

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