The economics of ion implantation

• 1 July 1991
• journal article
• Published by Elsevier in Materials Science and Engineering: A
• Vol. 139, 207-213
• https://doi.org/10.1016/0921-5093(91)90618-w

Abstract

Keywords

• ION IMPLANTATION
• ECONOMICS OF THE PROCESS
• NEW TECHNIQUE
• SURFACE MODIFICATION
• ION SOURCES
• CONTROL SYSTEMS
• DESIGNED