50-kV pulse generator for plasma source ion implantation*

• 1 March 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (2) , 821-822
• https://doi.org/10.1116/1.587352

Abstract

Keywords

• ION IMPLANTATION