Study of the surface properties of thermally oxidized silicon using surface acoustic wave attenuation
- 30 June 1979
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 22 (6) , 541-548
- https://doi.org/10.1016/0038-1101(79)90016-9
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Study of the Semiconductor Surface Space Charge Layer Using a SAW ConvolverIEEE Transactions on Sonics and Ultrasonics, 1977
- Determination of electrical surface properties of Si, GaAs, and CdS using acoustic surface waveJournal of Vacuum Science and Technology, 1976
- Determination of semiconductor surface properties using surface acoustic wavesApplied Physics Letters, 1975
- Convolution and parametric interaction with semiconductorsJournal of Applied Physics, 1973
- Linear and Nonlinear Attenuation of Acoustic Surface Waves in a Piezoelectric Coated with a Semiconducting FilmJournal of Applied Physics, 1970