Preparation and Properties of Unsupported Positive Coefficient Thin Thermistor Films

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Abstract
Thermistor films 5–25 μ in thickness were sputtered onto a pyrolytic graphite substrate from a lanthanum-doped barium–strontium–titanate (Ba0.600Sr0.397La0.003TiO3) cathode. Heating of the film and substrate from 500 ° to 850 °C in air will separate it from the substrate. The free-films can then be supported on a pure barium-titanate setter-plate, and fired subsequently at 1400 °C in argon and cooled in oxygen to achieve a temperature coefficient of resistance of at least +6%/ °C at 25 °C. If flexible graphite tape is used as a substrate, sputtered films up to 25 μ in thickness can be prepared.

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