Interferometric measurements of the complex amplitude of the defocus signal V(z) in the confocal scanning optical microscope
- 15 October 1986
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 60 (8) , 2708-2712
- https://doi.org/10.1063/1.337099
Abstract
A confocal interference microscope incorporating an electro‐optic phase modulator has been used to make simultaneous measurements of the inphase and quadrature components of the confocal signal as a reflecting surface is scanned axially, the so‐called V(z) response. Comparison with previously published theoretical predictions is seen to be favorable.This publication has 7 references indexed in Scilit:
- Fourier transform approach to materials characterization with the acoustic microscopeJournal of Applied Physics, 1983
- A Confocal Interference MicroscopeOptica Acta: International Journal of Optics, 1982
- Observation of optical signatures of materialsApplied Physics Letters, 1982
- Experimental observations of the depth-discrimination properties of scanning microscopesOptics Letters, 1981
- Effects of high angles of convergence on V(z) in the scanning acoustic microscope.Applied Physics Letters, 1981
- An angular-spectrum approach to contrast in reflection acoustic microscopyJournal of Applied Physics, 1978