Application of glow discharge optical emission spectroscopy (GDOES) to the analysis of PVD- and CVD-layers
- 1 January 1993
- journal article
- Published by Springer Nature in Analytical and Bioanalytical Chemistry
- Vol. 346 (1) , 165-168
- https://doi.org/10.1007/bf00321405
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Glow discharge optical emission spectroscopy as applied to the analysis of powdered materialsSpectrochimica Acta Part B: Atomic Spectroscopy, 1991
- Structure and properties of TiCx layers prepared by plasma-assisted chemical vapour deposition methodsMaterials Science and Engineering: A, 1991
- Atomic transport phenomena in the glow discharge source during the analysis of powders—I. Investigation of model specimensSpectrochimica Acta Part B: Atomic Spectroscopy, 1986