Preparation of High-Resistivity Silicon by Vacuum Float Zoning

• 1 January 1974
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 121  (9) , 1222
• https://doi.org/10.1149/1.2402018

Abstract

Keywords

• VACUUM FLOAT
• FLOAT ZONING
• HIGH RESISTIVITY SILICON
• SILICON BY VACUUM