Tensile Testing of Ultra-Thin-Film Materials Deposited on Polyimide for Mems Applications
- 1 January 1998
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Thickness dependent mechanical behavior of submicron aluminum filmsJournal of Electronic Materials, 1997
- Digital Light Processing for high-brightness high-resolution applicationsPublished by SPIE-Intl Soc Optical Eng ,1997
- Film Thickness Effect on Tensile Properties and Microstructures of Submicron Aluminum Thin Films on PolyimideMRS Proceedings, 1996
- Dislocations and Plastic Flow in CrystalsAmerican Journal of Physics, 1954