A Parallel Detecting, Spectroscopic Ellipsometer for Intelligent Process Control of Continuously Deposited CIGS Films
- 1 January 2000
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Real time spectroscopic ellipsometry for characterization of nucleation, growth, and optical functions of thin filmsThin Solid Films, 1993
- Minimal-data approaches for determining outer-layer dielectric responses of films from kinetic reflectometric and ellipsometric measurementsApplied Physics Letters, 1993
- Entropy-based algorithms for best basis selectionIEEE Transactions on Information Theory, 1992