Inelastic sputtering of solids by ions

• 30 November 1988
• journal article
• Published by IOP Publishing in Soviet Physics Uspekhi
• Vol. 31  (11) , 1015-1034
• https://doi.org/10.1070/pu1988v031n11abeh005646

Abstract

Keywords

• INELASTIC SPUTTERING OF SOLIDS
• SPUTTERING OF SOLIDS BY IONS