Quantitative two-dimensional dopant profile measurement and inverse modeling by scanning capacitance microscopy
- 16 January 1995
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 66 (3) , 344-346
- https://doi.org/10.1063/1.114207
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: