The effect of power on the plasma-assisted deposition of fluorinated monomers

• 1 November 1990
• journal article
• research article
• Published by Wiley in Journal of Polymer Science Part A: Polymer Chemistry
• Vol. 28  (12) , 3387-3402
• https://doi.org/10.1002/pola.1990.080281217

Abstract

Keywords

• STRUCTURE
• DISCHARGES
• CHARGED
• ETCHING
• ATOMS
• FED
• RADICALS
• FLUORINATED
• GLOW