Ultra-shallow boxlike profiles fabricated by pulsed ultraviolet-laser doping process

• 1 January 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (1) , 399-404
• https://doi.org/10.1116/1.587135

Abstract

Keywords

• CHARGED PARTICLES
• SECONDARY ION MASS SPECTROMETRY
• ION BEAM
• ELECTROMAGNETIC RADIATION