Laser-Induced Fluorescence Measurements and Kinetic Analysis of Si Atom Formation in a Rotating Disk Chemical Vapor Deposition Reactor
- 1 October 1994
- journal article
- Published by American Chemical Society (ACS) in The Journal of Physical Chemistry
- Vol. 98 (40) , 10138-10147
- https://doi.org/10.1021/j100091a032
Abstract
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