Ion bombardment induced surface topography modification of clean and contaminated single crystal Cu and Si
- 1 August 1982
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 4 (4) , 141-150
- https://doi.org/10.1002/sia.740040404
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Depth profiling by secondary ion mass spectrometryScanning, 1980