Selective Transmission Of Thin TiN-Films

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Abstract
The solar selective properties of thin titanium nitride films have been studied. High quality TiN-films were made on fused silica and glass substrates by reactive sputtering of titanium in a nitrogen atmosphere. The resulting film thicknesses ranged from 5 - 120 nm. The reflectance and transmittance measurements confirm the high solar and visible transmission previously calculated from optical constants. The infrared reflection is lower than calculated, but sufficiently high to make TiN a new competitor for selective transmission applications. Three optical parameters were determined and used to obtain the optical constants as well as the film thickness. The refractive index increases with decreasing thickness. The extinction coefficient is almost constant above the thickness of 12 nm, but strongly reduced for films thinner than this.

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