Electrochemical adjustment of thin film Ti-Pd resistors

• 1 October 1987
• journal article
• Published by Elsevier in Thin Solid Films
• Vol. 153  (1) , 387-399
• https://doi.org/10.1016/0040-6090(87)90199-4

Abstract

Keywords

• THIN FILM
• ELECTROCHEMICAL ADJUSTMENT
• PD RESISTORS
• TI PD
• FILM TI