Micromachined capacitive accelerometer
- 1 May 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 27 (1-3) , 555-558
- https://doi.org/10.1016/0924-4247(91)87050-d
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Design optimization for cantilever-type accelerometersSensors and Actuators, 1984
- A micromechanical capacitive accelerometer with a two-point inertial-mass suspensionSensors and Actuators, 1983
- A batch-fabricated silicon accelerometerIEEE Transactions on Electron Devices, 1979