Incorporation of Boron into Epitaxially Grown Silicon

• 1 January 1964
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 111  (4) , 491-492
• https://doi.org/10.1149/1.2426160

Abstract

Keywords

• INCORPORATION OF BORON
• BORON INTO EPITAXIALLY
• EPITAXIALLY GROWN SILICON