Low energy sputtering of resistive films
- 1 June 1967
- Vol. 17 (6) , 317-324
- https://doi.org/10.1016/0042-207x(67)92177-x
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Temperature Coefficients of Resistance of Metallic Films in the Temperature Range 25° to 600°CJournal of Applied Physics, 1959