Gasphasenabscheidung von Elementarem Bor bei Substrattemperaturen von 1100 bis 1400 °C
- 30 April 1973
- journal article
- Published by Elsevier in Journal of the Less Common Metals
- Vol. 31 (1) , 15-34
- https://doi.org/10.1016/0022-5088(73)90127-6
Abstract
No abstract availableKeywords
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