The defect structure of vitreous SiO2 films on silicon III. The role of defect structure in the growth of SiO2 films
- 16 March 1980
- journal article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 58 (1) , 107-113
- https://doi.org/10.1002/pssa.2210580113
Abstract
No abstract availableKeywords
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