Ta Thin-Film Capacitors with an Al Underlay for High-Frequency Applications
- 1 March 1981
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Components, Hybrids, and Manufacturing Technology
- Vol. 4 (1) , 140-147
- https://doi.org/10.1109/tchmt.1981.1135774
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Thermal Cycling and Surface Reconstruction in Aluminum Thin FilmsJournal of the Electrochemical Society, 1969