A spiral scanning attachment for electron-channelling studies with a scanning electron microscope

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Abstract
The principles of design and practical use of a digital circuit for the correction of spherical aberration effects in selected-area electron-channelling experiments are described. The apparatus employs spiral scanning and the dynamic focusing of the final lens, with a range of mathematical functions for the correction signal. A method is described for the calibration of the microscope and an example of its use is presented.