Effect of ion implantation on thin hard coatings
- 1 September 1983
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 107 (2) , 191-199
- https://doi.org/10.1016/0040-6090(83)90021-4
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- The effect of ion implantation on r.f.-sputtered TiB2 filmsThin Solid Films, 1981
- Ion-beam-induced reactions in metal-semiconductor and metal-metal thin film structuresNuclear Instruments and Methods, 1981
- Approximations and interpolation rules for ranges and range stragglingsRadiation Effects, 1970
- Effect of ion bombardment on the adhesion of aluminium films on glassThin Solid Films, 1969