Thinning techniques for 1 mu m ELO-SOI
- 6 January 2003
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Epitaxial Lateral Overgrowth of Silicon over Steps of Thick SiO2Journal of the Electrochemical Society, 1986
- Selective Silicon Epitaxy Using Reduced Pressure TechniqueJapanese Journal of Applied Physics, 1982