Continuous roll-to-roll amorphous silicon photovoltaic manufacturing technology

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Abstract
Energy Conversion Devices, Inc. (ECD) has designed and constructed a 2 Megawatt (mW) manufacturing line that produces triple‐junction spectrum‐splitting a‐Si alloy solar cells in a continuous roll‐to‐roll process. This manufacturing line has reliably and consistently produced high efficiency solar cells. We have demonstrated the production of 4ft 2 triple‐junction two band‐gap a‐Si alloy PV production modules with 8% stable aperture area efficiency. The production line has successfully incorporated: 1) a band‐gap profiled a‐Si‐Ge narrow band‐gap solar cell deposited in a continuous roll‐to‐roll process using a proprietary gas distribution manifold and cathode configuration; and 2) a textured Ag/ZnO back‐reflector deposited in a continuous roll‐to‐roll sputtering machine with production subcell yields greater than 99%.

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