The accuracy of the measurement of the ellipsometric parameters Δ and ψ
- 31 August 1969
- journal article
- Published by Elsevier in Surface Science
- Vol. 16, 74-84
- https://doi.org/10.1016/0039-6028(69)90006-5
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Ellipsometric liquid immersion method for the determination of all the optical parameters of the system: Nonabsorbing film on an absorbing substrateSurface Science, 1969
- Formulas for Using Wave Plates in Ellipsometry*Journal of the Optical Society of America, 1967
- Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometryJournal of Research of the National Bureau of Standards Section A: Physics and Chemistry, 1963
- Determination of the Properties of Films on Silicon by the Method of EllipsometryJournal of the Optical Society of America, 1962