Aresnic Diffusion in Silicon from Doped Polycrystalline Silicon

• 1 February 1978
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 17  (2) , 457-458
• https://doi.org/10.1143/jjap.17.457

Abstract

Keywords

• ARESNIC DIFFUSION
• DIFFUSION IN SILICON
• SILICON FROM DOPED
• DOPED POLYCRYSTALLINE SILICON