Control tribological and mechanical properties of MEMS surfaces. Part 1: critical review
- 22 July 1999
- journal article
- Published by Springer Nature in Microsystem Technologies
- Vol. 5 (4) , 173-180
- https://doi.org/10.1007/s005420050160
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: