A sputtering wind

• 1 May 1985
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 3  (3) , 561-566
• https://doi.org/10.1116/1.572994

Abstract

Keywords

• SPUTTERING
• ROTATION
• ORIENTATION
• MODEL
• WIND
• MIDLENGTH
• MAGNETRON
• SOURCE
• BASE PRESSURE