Formation of Thin Films of BaTiO3 by Evaporation

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Abstract
Ferroelectric films of BaTiO3 approximately 1 to 2 microns thick have been formed on platinum substrates by evaporation in a vacuum and a subsequent heat treatment in air. The structure of the crystallites which make up the films is mainly perovskite with the hexagonal phase as a minor constituent. Dielectric measurements show that the Curie temperature is about 120°C. The sharpness of the Curie transition depends to a large extent on the size of the BaTiO3 crystallites. The structure of the film seems to influence the dielectric constant and the saturation and remanent polarization of the film.