Discussion of “An Investigation of the Thickness Variation of Spun‐on Thin Films Commonly Associated with the Semiconductor Industry” [W. J. Daughton and F. L. Givens (pp. 173–179, Vol. 129, No. 1)]
- 1 December 1982
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 129 (12) , 2881-2882
- https://doi.org/10.1149/1.2123718
Abstract
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