Silicon contamination of substrates in fluorocarbon plasmas produced in glass reactors

• 6 June 1994
• journal article
• research article
• Published by Wiley in Journal of Applied Polymer Science
• Vol. 52  (10) , 1419-1429
• https://doi.org/10.1002/app.1994.070521008

Abstract

Keywords

• CONTAMINATION
• SILICON
• NITROGEN
• MODIFICATION
• POLYMER SUBSTRATES
• PLASMAS
• FLUOROCARBON
• REACTOR