Mechanical Properties of Amorphous Hard Carbon Films Prepared by Cathodic ARC Deposition
- 1 January 1995
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 19 references indexed in Scilit:
- Effect of vacuum arc deposition parameters on the properties of amorphous carbon thin filmsSurface and Coatings Technology, 1994
- Fabrication of amorphous diamond filmsThin Solid Films, 1993
- Macroparticle-free thin films produced by an efficient vacuum arc deposition techniqueJournal of Applied Physics, 1993
- Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energyPhysical Review B, 1993
- Filtered arc deposition of amorphous diamondApplied Physics Letters, 1992
- Diamond-like carbon films synthesized by cathodic arc evaporationThin Solid Films, 1992
- Properties of diamond-like coatings prepared by vacuum arc depositionSurface and Coatings Technology, 1991
- Properties of tetrahedral amorphous carbon prepared by vacuum arc depositionDiamond and Related Materials, 1991
- Compressive-stress-induced formation of thin-film tetrahedral amorphous carbonPhysical Review Letters, 1991
- Vapor deposition processes for amorphous carbon films with sp3 fractions approaching diamondJournal of Applied Physics, 1991