Electrically programmable fuse (eFUSE) using electromigration in silicides
- 7 November 2002
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters
- Vol. 23 (9) , 523-525
- https://doi.org/10.1109/led.2002.802657
Abstract
For the first time we describe a positive application of electromigration, as an electrically programmable fuse device (eFUSE). Upon programming, eFUSE's show a large increase in resistance that enable easy sensing. The transient device characteristics show that the eFUSE stays in a low resistance state during programming due to the local heating of the fuse link. The programming is enhanced by a device design that uses a large cathode which increases the temperature gradient and minimizes the effect of microstructural variations.Keywords
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