A New Etchant for Thin Films of Tantalum and Tantalum Compounds

• 1 January 1969
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 116  (5) , 674
• https://doi.org/10.1149/1.2412013

Abstract

Keywords

• NEW ETCHANT
• TANTALUM COMPOUNDS
• FILMS OF TANTALUM
• TANTALUM AND TANTALUM
• ETCHANT FOR THIN