Oxidation of Silicon Carbide: Problems and Solutions

• 1 April 2002
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 389-393, 961-966
• https://doi.org/10.4028/www.scientific.net/msf.389-393.961

Abstract

Keywords

• ELECTRICAL DEGRADATION
• SIC/OXIDE INTERFACES
• THERMAL OXIDATION