Physical Properties of Thick Sputter-Deposited Glass Films

• 1 January 1973
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 120  (11) , 1535
• https://doi.org/10.1149/1.2403298

Abstract

Keywords

• PHYSICAL PROPERTIES
• SPUTTER DEPOSITED
• GLASS FILMS
• DEPOSITED GLASS
• THICK SPUTTER
• PROPERTIES OF THICK