A study of electron beam evaporated SiO2, TiO2, and Al2O2 films using RBS, HFS, and SIMS

Publisher Website

1 January 1990

journal article
Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Vol. 45 (1-4) , 664-668
https://doi.org/10.1016/0168-583x(90)90921-g

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

Quantification of hydrogen in surfaces and thin films using a non-destructive forward scattering technique
Thin Solid Films, 1984