A capacitive accelerometer using SDB-SOI structure
- 1 May 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 53 (1-3) , 267-272
- https://doi.org/10.1016/0924-4247(96)01154-5
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology (06555102)
- Foundation Advanced Technology Institute
This publication has 2 references indexed in Scilit:
- Integrated silicon capacitive accelerometer with PLL servo techniqueSensors and Actuators A: Physical, 1993
- Precision accelerometers with μg resolutionSensors and Actuators A: Physical, 1990