Summary Abstract: High‐performance molecular secondary ion mass spectrometry (SIMS)

• 1 April 1982
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 20  (4) , 1068-1069
• https://doi.org/10.1116/1.571544

Abstract

Keywords

• MASS SPECTROMETRY
• SIMS
• SECONDARY ION
• ION MASS
• SUMMARY ABSTRACT
• MOLECULAR SECONDARY
• PERFORMANCE MOLECULAR